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Statistical Process Control
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Statistical Process Control (SPC) is a software option which allows users of semiconductor manufacturing tools to gather process data over a period of time and use it to analyze and understand machine performance trends.
The scope of work included software enhancements to the SPC software, which include adding modifications to the display and printing of graphs, such as adding machine id, date range, and recipe, and adding an X library key/legend to the printout of a chart, changing the resolution of data points. In addition, modifications were made to the alarms and error handling for the SPC software.